Blank Cover Image

ORGANOMETALLIC CVD OF CoGa AND RELATED BIMETALLIC THIN FILMS FROM NOVEL SINGLE SOURCE PRECURSORS

Author(s):
Fischer, Roland A.  
Publication title:
Chemical perspectives of microelectric materials III : symposium held November 30-December 3, 1992, Boston, Massachusetts, U.S.A.
Title of ser.:
Materials Research Society symposium proceedings
Ser. no.:
282
Pub. Year:
1993
Page(from):
267
Page(to):
274
Pages:
8
Pub. info.:
Pittsburgh, Pa.: Materials Research Society
ISSN:
02729172
ISBN:
9781558991774 [1558991778]
Language:
English
Call no.:
M23500/282
Type:
Conference Proceedings

Similar Items:

1 Conference Proceedings Organometallic CVD of ss-CoGa and CoIn Thin Films from Organometallic Single Source Precursors

Fischer, R.A., Rogge, W.

Electrochemical Society
7 Conference Proceedings *TAILORED ORGANOMETALLICS AS LOW-TEMPERATURE CVD PRECURSORS TO THIN FILMS

Girolami, G.S., Jensen, J.A., Gozum, J.E., Pollina, D.M.

Materials Research Society
2 Conference Proceedings Organometallic Chemical Vapor Deposition of Group-III Nitride Thin Films Using Single-Source Precursors

Fischer, Roland A., Rogge, Wolfram

MRS - Materials Research Society
8 Conference Proceedings LOW-TEMPERATURE DEPOSITION OF ZrC THIN FILMS FROM A SINGLE-SOURCE PRECURSOR

Smith, David C., Rubiano, Rodrigo R., Healy, Matthew D., Springer, Robert W.

Materials Research Society
3 Conference Proceedings Deposition of II/VI Thin Films from Novel Single-Source Precursors

Afzaal, Mohammad, Malik, Mohammad Azad, O'Brien, Paul, Park, Jin-Ho

Materials Research Society
9 Conference Proceedings Nanoscale ZuS and CdS Thin Films from Single-Source Molecular Precursors

Armelao, L., Barreca, D., Bottaro, G., Gasparotto, A., Maragno, C., Sada, C., Spalding, T.R., Tondello, E.

Electrochemical Society
4 Conference Proceedings Volatile single source precursors for the MOCVD of metal silicate thin films

Patil, U., Becker, H. -W., Winter, M., Fischer, R. A., Devi, A.

Electrochemical Society
10 Conference Proceedings Low-Temperature Deposition of ZrC Thin Films from a Single-Source Precursor

Smith, D.C., Healy, M.D., Rubiano, R.R., Springer, R.W.

Electrochemical Society
5 Conference Proceedings Group III metal sulfide thin films from single-source precursors by chemical vapor deposition (CVD) techniques

Lazell, Mike R., O'Brien, Paul, Otway, David J., Park, Jin-Ho

MRS-Materials Research Society
11 Conference Proceedings Single-Source CVD Precursors for CdS/Cu(I) Thin Solid Films and CdS-Cu2S Heterostructures

Zemskova, S.M., Sysoev, S.V., Glinskaya, L.A., Klevtsova, R.F., Gromilov, S.A., Larionov, S.V.

Electrochemical Society
6 Conference Proceedings Growth kinetics of GaN thin films grown by OMVPE using single source precursors

Fischer, R. A., Wohlfart, A., Devi, A., Rogge, W.

MRS-Materials Research Society
12 Conference Proceedings Plasma-enhanced CVD of hard SiCN thin films using bistrimethyl silylcarbodiimide or hexamethyl disilazane as single source precursors

Stelzner, Th., Folk, F., Stafast, H., Probst, D., Hoche, H.

Electrochemical Society
1
 
2
 
3
 
4
 
5
 
6
 
7
 
8
 
9
 
10
 
11
 
12