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*ANOTHER STEP IN DEVELOPING A SINGLE WAFER INTEGRATED PROCESS: RAPID THERMAL LOW PRESSURE METALORGANIC CHEMICAL VAPOR DEPOSITION OF LOCAL DIFFUSED W(Zn) CONTACTS

Author(s):
Katz, A.
Feingold, A.
El-Roy, A.
Moriya, N.
Pearton, S.J.
Rusby, A.
Kovalchick, J.
Abernathy, C.R.
Geva, M.
Lane, E.
5 more
Publication title:
Chemical perspectives of microelectric materials III : symposium held November 30-December 3, 1992, Boston, Massachusetts, U.S.A.
Title of ser.:
Materials Research Society symposium proceedings
Ser. no.:
282
Pub. Year:
1993
Page(from):
217
Page(to):
228
Pages:
12
Pub. info.:
Pittsburgh, Pa.: Materials Research Society
ISSN:
02729172
ISBN:
9781558991774 [1558991778]
Language:
English
Call no.:
M23500/282
Type:
Conference Proceedings

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