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DRY SURFACE CLEANING OF PLASMA-ETCHED HEMTs

Author(s):
Pearton, S.J.
Ren, F.
Katz, A.
Chakrabarti, U.K.
Lane, E.
Hobson, W.S.
Kopf, R.F.
Abernathy, C.R.
Wu, C.S.
Bohling, D.A.
Ivankovits, J.C.
6 more
Publication title:
Chemical perspectives of microelectric materials III : symposium held November 30-December 3, 1992, Boston, Massachusetts, U.S.A.
Title of ser.:
Materials Research Society symposium proceedings
Ser. no.:
282
Pub. Year:
1993
Page(from):
131
Page(to):
138
Pages:
8
Pub. info.:
Pittsburgh, Pa.: Materials Research Society
ISSN:
02729172
ISBN:
9781558991774 [1558991778]
Language:
English
Call no.:
M23500/282
Type:
Conference Proceedings

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