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EFFECTS OF GAMMA-RAY IRRADIATION AND THERMAL ANNEALING ON CHARACTERISTICS OF 3C-SiC MOS STRUCTURE

Author(s):
Yoshikawa, M.
Morita, Y.
Itoh, H.
Nashiyama, I.
Okumura, H.
Misawa, S.
Yoshida, S.
2 more
Publication title:
Semiconductor heterostructures for photonic and electronic applications : symposium held November 30-December 4, 1992, Boston, Massachusetts, U.S.A.
Title of ser.:
Materials Research Society symposium proceedings
Ser. no.:
281
Pub. date:
1993
Page(from):
797
Page(to):
802
Pages:
6
Pub. info.:
Pittsburgh, Pa.: Materials Research Society
ISSN:
02729172
ISBN:
9781558991767 [155899176X]
Language:
English
Call no.:
M23500/281
Type:
Conference Proceedings

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