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GROWTH OF Ge-ON-Si STRUCTURES USING REMOTE PLASMA-ENHANCED CHEMICAL VAPOR DEPOSITION

Author(s):
Qian, Rong Z.
Kinosky, D.
Mahajan, A.
Thomas, S.
Fretwell, J.
Munguia, P.
Banerjee, S.
Tasch, A.
3 more
Publication title:
Semiconductor heterostructures for photonic and electronic applications : symposium held November 30-December 4, 1992, Boston, Massachusetts, U.S.A.
Title of ser.:
Materials Research Society symposium proceedings
Ser. no.:
281
Pub. Year:
1993
Page(from):
421
Page(to):
426
Pages:
6
Pub. info.:
Pittsburgh, Pa.: Materials Research Society
ISSN:
02729172
ISBN:
9781558991767 [155899176X]
Language:
English
Call no.:
M23500/281
Type:
Conference Proceedings

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