Blank Cover Image

EFFECT OF THE CRYSTALLOGRAPHIC ORIENTATION OF UNDERLYING POLY-Si ON THE THERMAL STABILITY OF THE TiSi2 FILM

Author(s):
Kim, Y.W.
Kim, I.K.
Lee, N.I.
Ko, J.W.
Ahn, S.T.
Lee, M.Y.
Lee, J.G.
2 more
Publication title:
Evolution of surface and thin film microstructure : symposium held November 30-December 4, 1992, Boston, Massachusetts, U.S.A.
Title of ser.:
Materials Research Society symposium proceedings
Ser. no.:
280
Pub. Year:
1993
Page(from):
599
Page(to):
602
Pages:
4
Pub. info.:
Pittsburgh, Pa.: Materials Research Society
ISSN:
02729172
ISBN:
9781558991750 [1558991751]
Language:
English
Call no.:
M23500/280
Type:
Conference Proceedings

Similar Items:

1 Conference Proceedings THERMAL STABILITY OF THE TiSi2 FILM UNDER THE DIELECTRIC CAPPING LAYER

Kim, Y. W., Lee, N. I., Ahn, S. T.

MRS - Materials Research Society
7 Conference Proceedings The Eletrical characteristics of W/WNx/poly Si1-xGex and the MOSCAP structures with W/WNx/poly Si1-xGex gates stack

Kang, S.-K, Kim, J.J., Kang, H.B., Yang, C.W., Ahn, T.H., Yeo, I.S., Lee, T.W., Lee, Y.H., Ko, D.-H.

Electrochemical Society
2 Conference Proceedings Effect of Thermal Spray Processing Techniques on the Microstructure and Properties of Ni-Based Amorphous Coatings

Lee, S. M., Moon, B. M., Fleury, E., Ahn, H. S., Kim, D. H., Kim, W. T., Sordelet, D. J.

Trans Tech Publications
8 Conference Proceedings EPITAXIAL GROWTH AND STABILITY OF 649 TiSi2 ON Si(111)

Jeon, Hyeongtag, Honeycutt, J. W., Sukow, C. A., Humphreys, T. P., Nemanich, R. J., Rozgonyi, G. A.

Materials Research Society
3 Conference Proceedings Effect of Metal Additives (Co and Ni) on the Electrochemical Properties of Lithium/FeS2 Batteries

J.W. Choi, G. Cheruvally, J.H. Ahn, K.W. Kim, H.J. Ahn

Trans Tech Publications
9 Conference Proceedings Evaluation and Control of Crystallographic Alignment of Biological Apatite Crystallites in Bones

T. Nakano, T. Ishimoto, J.W. Lee, S. Miyabe, N. Ikeo

Trans Tech Publications
4 Conference Proceedings SURFACE STABILITY AND FLOW CHARACTERISTICS OF BPSG FILM BY N2O PLASMA TREATMENT

Kim, C.G., Lee, H.S., Ahn, Y.C., Chung, U.I., Lee, J.K., Lee, J.G.

Materials Research Society
10 Conference Proceedings Transformation Behavior and Shape Memory Characteristics of Ti-45Ni-5Cu(at%) Alloy Ribbons Fabricated by Melt Spinning

Nam, T.H., Lee, J.H., Kim, T.Y., Kim, Y.W.

Trans Tech Publications
5 Conference Proceedings The Electrical Characteristics of the MOSCAP Structures with W/WNx/poly Si1-xGex Gates Stack

Kang, S.-K., Kim, J.J., Ko, D.-H., Ahn, T.H., Yeo, I.S., Lee, T.W., Lee, Y.H.

Materials Research Society
11 Conference Proceedings Inhibition Mechanism of Magnesium Ion on Carbonation Reaction with Ca(OH)2 and CO2

Kim, J.H., Ahn, J.W., Ko, S.J., Park, W.K., Han, C.

Trans Tech Publications
6 Conference Proceedings Thermal stability of PECVD W-B-N thin film as a diffusion barrier

Kim,Y.T., Kim,D.J., Lee,C.W., Park,J.-W.

SPIE-The International Society for Optical Engineering
12 Conference Proceedings Residence Time Distribution in Twin-Screw Extruder Measured by Non-destructive Ultrasonic Device

Lee, S.M., Han, J.H., Ahn, Y., Lee, J.W., Kim, J.G.

Society of Plastics Engineers
1
 
2
 
3
 
4
 
5
 
6
 
7
 
8
 
9
 
10
 
11
 
12