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UHV-MOCVD GROWTH AND IN SITU CHARACTERIZATION OF EPITAXIAL TiO2 FILMS

Author(s):
Chen, Samuel
Gysling, H.J.
Paz-Pujalt, G.R.
Blanton, T.N.
Castro, T.
Chen, K.M.
Fictorie, C.
Gladfelter, W.L.
Franciosi, A.
Cohen, P.I.
Evans, J.F.
6 more
Publication title:
Evolution of surface and thin film microstructure : symposium held November 30-December 4, 1992, Boston, Massachusetts, U.S.A.
Title of ser.:
Materials Research Society symposium proceedings
Ser. no.:
280
Pub. date:
1993
Page(from):
173
Page(to):
178
Pages:
6
Pub. info.:
Pittsburgh, Pa.: Materials Research Society
ISSN:
02729172
ISBN:
9781558991750 [1558991751]
Language:
English
Call no.:
M23500/280
Type:
Conference Proceedings

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