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AFM STUDIES OF SURFACE ROUGHNESS OF BOROPHOSPHOSILICATE GLASS (BPSG) FILMS AND THEIR IMPACT ON DEFECT DETECTION CAPABILITY FOR SUB MICRON VLSI TECHNOLOGY

Author(s):
Rojhantalab, H.
Moinpour, M.
Peter, N.
Dass, M.L.A.
Hough, W.
Natter, R.
Moghadam, F.
2 more
Publication title:
Evolution of surface and thin film microstructure : symposium held November 30-December 4, 1992, Boston, Massachusetts, U.S.A.
Title of ser.:
Materials Research Society symposium proceedings
Ser. no.:
280
Pub. Year:
1993
Page(from):
147
Page(to):
152
Pages:
6
Pub. info.:
Pittsburgh, Pa.: Materials Research Society
ISSN:
02729172
ISBN:
9781558991750 [1558991751]
Language:
English
Call no.:
M23500/280
Type:
Conference Proceedings

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