Blank Cover Image

FORMATION OF BURIED α- AND β-FeSi2 IN (100) Si BY HIGH DOSE ION IMPLANTATION

Author(s):
Publication title:
Beam-solid interactions : fundamentals and applications : symposium held November 30-December 4, 1992, Boston, Massachusetts, U.S.A.
Title of ser.:
Materials Research Society symposium proceedings
Ser. no.:
279
Pub. Year:
1993
Page(from):
869
Page(to):
874
Pages:
6
Pub. info.:
Pittsburgh, Pa.: Materials Research Society
ISSN:
02729172
ISBN:
9781558991743 [1558991743]
Language:
English
Call no.:
M23500/279
Type:
Conference Proceedings

Similar Items:

1 Conference Proceedings FORMATION OF β- AND α-FeSi2 FILMS ON (100) SILICON USING Fe-Si AND Fe-Ti-Si DIFFUSION COUPLES

Larsen, K. Kyllesbech, Lauwers, A., Maex, K., Rossum, M. Van

MRS - Materials Research Society
7 Conference Proceedings AMORPHOUS PHASE FORMATION DURING ION MIXING OF Ti/Si BILAYERS AT ELEVATED TEMPERATURE

Maex, K., De Keersmaecker, R. F., Van Rossum, M., van der Weg, W. F.

Materials Research Society
2 Conference Proceedings ELECTRIC AND MAGNETIC TRANSPORT IN ION-BEAM SYNTHESISED α-FeSi2

Larsen, K. Kyllesbech, Hove, M. Van, Lauwers, A., Maex, K., Rossum, M. Van

MRS - Materials Research Society
8 Conference Proceedings FORMATION OF BURIED IRIDIUM SILICIDE LAYER IN SILICON BY HIGH DOSE IRIDIUM ION IMPLANTATION

Yu, K. M., Katz, B,., Wu, I. C., Brown, I. G.

Materials Research Society
3 Conference Proceedings ION IMPLANTATION OF HIGH DOSES OF Co IN Si1-xGex ALLOYS

Lauwers, A., Maex, K., Vandervorst, W., Brijs, G., Poortmans, J., Caymax, M., Vanhellemont, J., Petersson, S.

Materials Research Society
9 Conference Proceedings 29 Influence of Activation Annealing and Silicidation Process on as Redistribution and Pile-up at the NixSiy/SiO2 Interface

Pawlak, M., Kittl, J. A., Janssens, T., Lauwers, A., Vandervorst, W., Anil, K. G., Schram, T., Veloso, A., van Dal, M.J. …

Electrochemical Society
4 Conference Proceedings ELECTRICAL CHARACTERISATION OF EPITAXIAL (100) CoSi2/Si CONTACTS OBTAINED USING A Ti/Co BILAYER

Lauwers, A., Vercaemst, A., Hove, M. Van, Larsen, K. Kyllesbech, Verbeeck, R., Meirhaeghe, R. Van, Maex, K., Rossum, M. …

MRS - Materials Research Society
10 Conference Proceedings Structural and optical properties of Si/β-FeSi2/Si heterostructures fabricated by Fe ion implantation and Si MBE

N. G. Galkin, E. A. Chusovitin, D. L. Goroshko, R. M. Bayazitov, R. I. Batalov, T. S. Shamirzaev, A. K. Gutakovsriy, K. …

SPIE - The International Society of Optical Engineering
5 Conference Proceedings GROWTH OF ION IMPLANTED BURIED FeSi2 ON Si(111) AND Si(100)

Radermacher, K., Mantl, S., Dieker, Ch., Holzbrecher, H., Speier, W., Luth, H.

Materials Research Society
11 Conference Proceedings Formation of High Quality β-FeSi2 by Pre-Amorphization-Enhanced Diffusion

Murakami, Y., Kenjo, A., Sadoh, T., Yoshitake, T., Miyao, M.

Materials Research Society
6 Conference Proceedings Enhancement of the METAL/Si-DOPED AlGaAs schottky barrier height by CH4/H2 reactive ion etching

Pereira, R., Hove, M. Van, Raedt, W. De, Alay, J., Bender, H., Vandervorst, W., Borghs, G., Rossum, M. Van

MRS - Materials Research Society
12 Conference Proceedings Ion beam synthesis of β-FeSi2 as an IR photosensitive material

Maeda,Y., Akita,T., Umezawa,K., Miyake,K., Sagawa,M.

SPIE-The International Society for Optical Engineering
1
 
2
 
3
 
4
 
5
 
6
 
7
 
8
 
9
 
10
 
11
 
12