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REMOTE PLASMA CLEANING AND ION-INDUCED HYDROGEN DESORPTION FROM THE SILICON (100) SURFACE AND ITS APPLICATIONS TO Si EPITAXY

Author(s):
Kinosky, David S.
Qian, R.
Mahajan, A.
Thomas, S.
Fretwell, J.
Munguia, P.
Banerjee, S.
Tasch, A.
3 more
Publication title:
Beam-solid interactions : fundamentals and applications : symposium held November 30-December 4, 1992, Boston, Massachusetts, U.S.A.
Title of ser.:
Materials Research Society symposium proceedings
Ser. no.:
279
Pub. Year:
1993
Page(from):
831
Page(to):
836
Pages:
6
Pub. info.:
Pittsburgh, Pa.: Materials Research Society
ISSN:
02729172
ISBN:
9781558991743 [1558991743]
Language:
English
Call no.:
M23500/279
Type:
Conference Proceedings

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