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DESIGN OF A LARGE-SCALE PLASMA SOURCE ION IMPLANTATION EXPERIMENT

Author(s):
Wood, B.P.
Scheuer, J.T.
Nastasi, M.A.
Olsher, R.H.
Reass, W.A.
Henins, I.
Rej, D.J.
2 more
Publication title:
Beam-solid interactions : fundamentals and applications : symposium held November 30-December 4, 1992, Boston, Massachusetts, U.S.A.
Title of ser.:
Materials Research Society symposium proceedings
Ser. no.:
279
Pub. Year:
1993
Page(from):
345
Page(to):
350
Pages:
6
Pub. info.:
Pittsburgh, Pa.: Materials Research Society
ISSN:
02729172
ISBN:
9781558991743 [1558991743]
Language:
English
Call no.:
M23500/279
Type:
Conference Proceedings

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