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THIN Ni SILICIDE FORMATION BY LOW TEMPERATURE-INDUCED METAL ATOM REACTION WITH ION IMPLANTED AMORPHOUS SILICON

Author(s):
Erokhin, Yu.N.
Patnaik, B.K.
Pramanick, S.
Hong, F.
White, C.W.
Rozgonyi, G.A.
1 more
Publication title:
Beam-solid interactions : fundamentals and applications : symposium held November 30-December 4, 1992, Boston, Massachusetts, U.S.A.
Title of ser.:
Materials Research Society symposium proceedings
Ser. no.:
279
Pub. date:
1993
Page(from):
237
Page(to):
242
Pages:
6
Pub. info.:
Pittsburgh, Pa.: Materials Research Society
ISSN:
02729172
ISBN:
9781558991743 [1558991743]
Language:
English
Call no.:
M23500/279
Type:
Conference Proceedings

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