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SUBSTRATE AND PARTICLE DEPENDENT DEEP LEVEL GENERATION IN SILICON BY MeV PARTICLE BEAMS

Author(s):
Trauwaert, M.-A.
Vanhellemont, J.
Simoen, E.
Claeys, C.
Johlander, B.
Harboe-Sorensen, R.
Adams, L.
Clauws, P.
3 more
Publication title:
Beam-solid interactions : fundamentals and applications : symposium held November 30-December 4, 1992, Boston, Massachusetts, U.S.A.
Title of ser.:
Materials Research Society symposium proceedings
Ser. no.:
279
Pub. Year:
1993
Page(from):
93
Page(to):
98
Pages:
6
Pub. info.:
Pittsburgh, Pa.: Materials Research Society
ISSN:
02729172
ISBN:
9781558991743 [1558991743]
Language:
English
Call no.:
M23500/279
Type:
Conference Proceedings

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