ION-BEAM REACTIVE SPUTTER DEPOSITION OF MgO THIN FILMS ON SILICON AND SAPPHIRE SUBSTRATES

ION-BEAM REACTIVE SPUTTER DEPOSITION OF MgO THIN FILMS ON SILICON AND SAPPHIRE SUBSTRATES

Author(s):

Publication title:

Materials modification by energetic atoms and ions : symposium held April 28-30, 1992, San Francisco, California, U.S.A.

Title of ser.:

Materials Research Society symposium proceedings

Ser. no.:

268

Pub. Year:

1992

Page(from):

253

Page(to):

260

Pages:

8

Pub. info.:

Pittsburgh, PA: Materials Research Society

ISSN:

02729172

ISBN:

9781558991637 [1558991638]

Language:

English

Call no.:

M23500/268

Type:

Conference Proceedings

Details

TDL ID:	ZA00015752
Series ID:	PA00000011
Conf. info. (Name):	Symposium on materials modification by energetic atoms and ions
Conf. info. (Number):	1992
Conf. info. (Venue):	San Francisco, CA, USA
Conf. info. (Date):	1992.04.28-1992.04.30

Similar Items:

1 Conference Proceedings ELECTROSTATIC ENERGY INDUCED 45° ROTATION IN HETEROEPITAXIAL KNbO3 THIN FILMS ON (001) MgO Rou, Shang Hsien, Graettinger, Thomas M., Auciello, Orlando, Kingon, Angus I. Materials Research Society	7 Conference Proceedings SCANNING TUNNELING MICROSCOPY AND SPECTROSCOPY OF Y-Ba-Cu-O THIN FILMS PRODUCED BY ION BEAM SPUTTER DEPOSITION Chapman, R.C., Auciello, O., Lichtenwalner, D.J., Adu, R.P., Soble II, C.N., Christensen, K.N., Woolcott, Jr., R.R., … Materials Research Society
2 Conference Proceedings HIGH RESOLUTION IMAGING OF TWIN AND ANTIPHASE DOMAIN BOUNDARIES IN PEROVSKITE KNbO3 THIN FILMS Rou, Shang, H., Hren, Philip D., Hren, John J., Graettinger, Thomas M., Ameen, Michael S., Auciello, Orlando H., Kingon, … Materials Research Society	8 Conference Proceedings GROWTH OF EPITAXIAL KNbO3 THIN FILMS Graettinger, Thomas M., Morris, P. A., Roshko, A., Kingon, A. I., Auciello, O., Lichtenwalner, D. J., Chow, A. F. MRS - Materials Research Society
3 Conference Proceedings COMPUTER SIMULATION OF SCATTERED ION AND SPUTTERED SPECIES EFFECTS IN ION BEAM SPUTTER-DEPOSITION OF HIGH TEMPERATURE SUPERCONDUCTING THIN FILMS Krauss, Alan R., Auciello, Orlando Materials Research Society	9 Conference Proceedings MICROSTRUCTURE AND ELECTRICAL PROPERTIES OF VERY THIN PZT FILMS DEPOSITED BY IN-SITU ION BEAM SPUTTERING Gifford, K.D., Al-Shareef, H.N., Rou, S.H., Hren, P.D., Auciello, O., Kingon, A.I. Materials Research Society
4 Conference Proceedings PHYSICAL VAPOR DEPOSITION OF MULTICOMPONENT OXIDE THIN FILMS: TECHNIQUES, BASIC DEPOSITION PROCESSES AND FILM PROCESSING-MICROSTRUCTURE-PROPERTY RELATIONSHIPS Auciello O., Kingon I. A., Krauss R. A., Lichtenwalner J. D. Kluwer Academic Publishers	10 Conference Proceedings PbTiO3 THIN FILMS BY CHEMICAL BEAM DEPOSITION Kingon, Al., Hsieh, K.Y., King, L.L.H., Rou, S.H., Bachmann, K.J., Davis, R.F. Materials Research Society
5 Conference Proceedings *MICROSTRUCTURAL CHARACTERIZATION OF EPITAXIAL BOTTOM ELECTRODES, BUFFER LAYERS, AND FERROELECTRIC THIN FILMS Rou, S.H., Graettinger, T.M., Chow, A.F., Soble, II, C.N., Lichtenwalner, D.J., Auciello, O., Kingon, A.I. Materials Research Society	11 Conference Proceedings *PROCESSING AND STRUCTURAL CHARACTERIZATION OF FERROELECTRIC THIN FILMS DEPOSITED BY ION BEAM SPUTTERING Ameen, M.S., Graettinger, T.M., Rou, S.H., Al-Shareef, H.N., Gifford, K.D., Auciello, O., Kingon, A.I. Materials Research Society
6 Conference Proceedings CHARACTERIZATION OF KNbO3 THIN FILMS DEPOSITED BY ION BEAM SPUTTERING USING A COMPUTER-CONTROLLED ROTATING TARGET HOLDER Ameen, M. S., Graettinger, T. M., Auciello, O., Rou, S. H., Kingon, A. I., Krauss, A. R. Materials Research Society	12 Conference Proceedings *ION BEAM SPUTTER DEPOSITION OF FERROELECTRIC OXIDE THIN FILMS Graettinger, Thomas M., Auciello, O., Ameen, M. S., Al-Shareef, H. N., Gifford, K., Kingon, A. I. Materials Research Society

1

2

3

4

5

6

7

8

9

10

11

12