Blank Cover Image

SOME PROPERTIES OF ULTRA THIN OXIDES GROWN IN AFTERGLOW OXYGEN PLASMA

Author(s):
Publication title:
Materials modification by energetic atoms and ions : symposium held April 28-30, 1992, San Francisco, California, U.S.A.
Title of ser.:
Materials Research Society symposium proceedings
Ser. no.:
268
Pub. Year:
1992
Page(from):
157
Page(to):
160
Pages:
4
Pub. info.:
Pittsburgh, PA: Materials Research Society
ISSN:
02729172
ISBN:
9781558991637 [1558991638]
Language:
English
Call no.:
M23500/268
Type:
Conference Proceedings

Similar Items:

1 Conference Proceedings IMPROVEMENTS ON ELECTRICAL PROPERTIES OF ULTRA-THIN SILCON OXIDES GROWN BY MICROWAVE AFTERGLOW OXYGEN PLASMA

Chen, P. C., Lin, J. Y., Hwang, H. L.

MRS - Materials Research Society
7 Conference Proceedings STUDY ON THE PHOTOCONDUCTIVE EFFECT FROM A P/N JUNCTION STRUCTURE INCORPORATED WITH POROUS SILICON

Yeh, C.C., Hsu, Klaus Y.J., Chen, P.C., Hwang, H.L.

Materials Research Society
2 Conference Proceedings ATOMIC OXIDATION OF ULTRA THIN SiGe USING AFTERGLOW OXYGEN PLASMA

Chen, P.C., Lin, J.Y., Hsu, Y.J., Hwang, H.L.

Materials Research Society
8 Conference Proceedings Oxygen Plasma Induced ZnO-CuO Nanostructure Growth on a Brass Substrate by Atmospheric-Pressure Plasma Jet

H.L. Chen, Z.C. Liou, S.J. Lin

Trans Tech Publications
3 Conference Proceedings Characterizations of Ultra-thin Dielectrics Grown by Microwave Afterglow O2/N2O Plasma Oxidation at Low Temperature with Rapid Thermal Annealing

Chen, Po-ching, Hsu, Klaus Yung-jane, Loferski, Joseph J., Hwang, Huey-liang

MRS - Materials Research Society
9 Conference Proceedings Thin film transistors made from hydrogenated microcrystalline silicon

Wang, K. C., Chen, B. Y., Hsu, K. C., Yew, T. R., Hwang, H. L.

MRS - Materials Research Society
4 Conference Proceedings Luminescence Efficiency and Optical Property of CsI and NaI Films

H.-L. Chen, J.-C. Hsu, Y.-H. Lin

Society of Vacuum Coaters
10 Conference Proceedings Effect of Oxygen Pressure on Magnesium Oxide Dielectrics Grown on GaN by Plasma Assisted Gas Source Molecular Beam Epitaxy

Onstine, A.H., Gila, B.P., Kim, J., Stodilka, D., Allums, K., Abernathy, C.R., Ren, F., Pearton, S.J.

Materials Research Society
5 Conference Proceedings The Optical and Electrical Properties of AZO Films Deposited at Room Temperature

J.-C. Hsu, Y.-H. Lin, Y.-Y. Chen

Society of Vacuum Coaters
11 Conference Proceedings Three-dimensional superresolution of focus-region of high numerical aperture objective lens: applied for multi-photon-absorption irradiation [5931-50]

Lai, N. D., Lin, J. H., Chen, P. W., Tang, J. L., Hsu, C. C.

SPIE - The International Society of Optical Engineering
6 Conference Proceedings Comparison in the growth and properties of RF sputtered ｦﾌc-Si:H and glow discharge-chemical vapor deposited ｦﾌc-Si:H films

Lin, J. Y., Tseng, B. H., Hsu, K. C., Hwang, H. L.

MRS - Materials Research Society
12 Conference Proceedings CURRENT-VOLTAGE CHARACTERISTICS OF POROUS SILICON MADE FROM A P/N JUNCTION STRUCTURE

Hsu, Y.J., Samanta, L.K., Wang, K.C., Chen, P.C., Hwang, H.L.

Materials Research Society
1
 
2
 
3
 
4
 
5
 
6
 
7
 
8
 
9
 
10
 
11
 
12