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MODELINF OF SILICON DEPOSITION YIELD AT LOW TEMPERATURE BY ArF EXCIMER LASER PHOTOLYSIS OF DISILANE

Author(s):
Fowler, B.
Lian, S.
Krishnan, S.
Li, C.
Jung, L.
Samara, D.
Manna, I.
Banerjee, S.
3 more
Publication title:
Mechanisms of Heteroepitaxial growth : symposium held April 27-30, 1992, San Francisco, California, U.S.A.
Title of ser.:
Materials Research Society symposium proceedings
Ser. no.:
263
Pub. Year:
1992
Page(from):
203
Page(to):
208
Pages:
6
Pub. info.:
Pittsburgh, PA: Materials Research Society
ISSN:
02729172
ISBN:
9781558991583 [1558991581]
Language:
English
Call no.:
M23500/263
Type:
Conference Proceedings

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