Blank Cover Image

VLPCVD HETEROEPITAXIAL GROWTH OF VERY THIN Ge-LAYERS ON Si-SUBSTRATES

Author(s):
Caymax,. Matty R.
Poortmans, J.
Van Ammel, A.
Nijs, J.
Vandervorst, W.
Vanhellemont, J.
Brijs, B.
2 more
Publication title:
Mechanisms of Heteroepitaxial growth : symposium held April 27-30, 1992, San Francisco, California, U.S.A.
Title of ser.:
Materials Research Society symposium proceedings
Ser. no.:
263
Pub. Year:
1992
Page(from):
85
Page(to):
90
Pages:
6
Pub. info.:
Pittsburgh, PA: Materials Research Society
ISSN:
02729172
ISBN:
9781558991583 [1558991581]
Language:
English
Call no.:
M23500/263
Type:
Conference Proceedings

Similar Items:

1 Conference Proceedings OPTIMIZATION OF Si-WAFER CLEANING AND THE USE OF BUFFER-LAYERS FOR EPITAXIAL GROWTH OF SiGe-LAYERS BY VLPCVD AT T = 650 C

Caymax, Matty R., Poortmans, J., Van Ammel, A., Vandervorst, W., Vanhellemont, J., Nijs, J.

Materials Research Society
7 Conference Proceedings STUDY OF THE TRANSVERSAL ELECTRON MOBILITY IN HETEROJUNCTION BIPOLAR TRANSISTORS WITH STRAINED Si1-XGeX -BASE

Poortmans, J., Caymax, M., Van Ammel, A., Libezny, M., Nijs, J.

Materials Research Society
2 Conference Proceedings Comparative Growth Kinetics of SiGe in a Commercial Reduced Pressure Chemical Vapor Deposition EPI Reactor and Anomalies During Growth of Thin Si Layers on SiGe

Caymax, Matty, Loo, Roger, Brijs, Bert, Vandervorst, Wilfried, Howard, David J., Kimura, Kenji, Nakajima, Kaoru

MRS - Materials Research Society
8 Conference Proceedings Tailored Si Layers on Silicon Oxide Obtained by Thermal CVD

Beaucarne, G., Poortmans, J., Caymax, M., Nijs, J., Mertens, R.

MRS - Materials Research Society
3 Conference Proceedings ION IMPLANTATION OF HIGH DOSES OF Co IN Si1-xGex ALLOYS

Lauwers, A., Maex, K., Vandervorst, W., Brijs, G., Poortmans, J., Caymax, M., Vanhellemont, J., Petersson, S.

Materials Research Society
9 Conference Proceedings STUDY OF THE INFLUENCE OF STRUCTURAL PROPERTIES ON Si AND Be DOPING OF HETEROEPITAXIAL InAsSb ON GaAs-COATED Si SUBSTRATES FOR INFRARED PHOTODIODES

Boeck, De J., Dobbelaere, W., Van Hove, M., Vanhellemont, J., De Raedt, W., Vandervorst, W., Mertens, R., Borghs, G.

Materials Research Society
4 Conference Proceedings A Thermal Migration of Ge During Junction Formation in s-Si Layers Grown on Thin SiGe-Buffer Layers

Vandervorst, W., Pawlak, B.J., Janssens, T., Brijs, B., Delhougne, R., Caymax, M., Loo, R.

Materials Research Society
10 Conference Proceedings High-k Materials for Advanced Gate Stack Dielectrics: A Comparison of ALCVD and MOCVD as Deposition Technologies

Caymax, Matty, Bender, H., Brijs, B., Conard, T., Gendt, S. De, Delabie, A., Heyns, M., Onsia, B., Ragnarsson, L., …

Materials Research Society
5 Conference Proceedings A Thermal Migration of Ge During Junction Formation in s-Si Layers Grown on Thin SiGe-Buffer Layers

Vandervorst, W., Pawlak, B.J., Janssens, T., Brijs, B., Delhougne, R., Caymax, M., Loo, R.

Materials Research Society
11 Conference Proceedings HETEROJUNCTION BIPOLAR TRANSISTORS (HBT) WITH a-SI :H OR pc-Si EMITTER

Symons, J., Nijs, J., Vanhellemont, J., Baert, K., Michiel, H., Willeke, G., Vandervorst, W., Mertens, R.

Materials Research Society
6 Conference Proceedings Characterization of Ultra Thin Layers by Rutherford Backscattering Spectrometry

Brijs,B., Deleu,J., Connard,T., Li,H., Loo,R., Caymax,M., Nakajima,K., Kimura,K., Vandervorst,W.

SPIE - The International Society for Optical Engineering
12 Conference Proceedings EVALUATION OF GaAs REGROWTH ON A NOVEL GaAs/SiO2 COMPOSITE SURFACE ON SILICON

De Boeck, J., Alay, J., vanhellemont, J., Brijs, B., Vandervorst, W., Borghs, G., Blondeel, M., Vinkier, C.

Materials Research Society
1
 
2
 
3
 
4
 
5
 
6
 
7
 
8
 
9
 
10
 
11
 
12