*DEFECT CONTROL IN Cz SILICON
- Author(s):
- Publication title:
- Defect engineering in semiconductor growth, processing and device technology : symposium held April 26-May 1, 1992, San Francisco, California, U.S.A.
- Title of ser.:
- Materials Research Society symposium proceedings
- Ser. no.:
- 262
- Pub. Year:
- 1992
- Page(from):
- 929
- Page(to):
- 944
- Pages:
- 16
- Pub. info.:
- Pittsburgh, Pa.: Materials Research Society
- ISSN:
- 02729172
- ISBN:
- 9781558991576 [1558991573]
- Language:
- English
- Call no.:
- M23500/262
- Type:
- Conference Proceedings
Similar Items:
SPIE-The International Society for Optical Engineering |
Electrochemical Society |
Electrochemical Society |
8
Conference Proceedings
Photoluminescence Intensity Analysis in Application To Contactless Characterization of Silicon Wafers*
Electrochemical Society |
3
Conference Proceedings
Application Of Room-Temperature Photoluminescence For Characterizing As-Grown And Thermally Processed CZ Silicon Wafers
Materials Research Society |
Trans Tech Publications |
Trans Tech Publications |
Trans Tech Publications |
Materials Research Society |
Trans Tech Publications |
Electrochemical Society |
12
Conference Proceedings
Defect distribution in large CZ-silicon wafers investigated by positron annihilation spectroscopy
Trans Tech Publications |