HEAT-TREATMENT INDUCED DEFECTS IN CZ-SILICON

Author(s):

• Dannefaer, S.
• Bretagnon, T.
• Abdurahman, K.
• Kerr, D.
• Hahn, S.

Publication title:

Defect engineering in semiconductor growth, processing and device technology : symposium held April 26-May 1, 1992, San Francisco, California, U.S.A.

Title of ser.:

Materials Research Society symposium proceedings

Ser. no.:

262

Pub. Year:

1992

Page(from):

671

Page(to):

676

Pages:

6

Pub. info.:

Pittsburgh, Pa.: Materials Research Society

ISSN:

02729172

ISBN:

9781558991576 [1558991573]

Language:

English

Call no.:

M23500/262

Type:

Conference Proceedings