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SURFACE CHARGE IMAGING IN SEMICONDUCTOR WAFERS BY SURFACE PHOTOVOLTAGE (SPV)_

Author(s):
Publication title:
Photo-induced space charge effects in semiconductors: electro-optics, photoconductivity, and the photorefractive effect : symposium held April 29-May 1, 1992, San Francisco, California, U.S.A.
Title of ser.:
Materials Research Society symposium proceedings
Ser. no.:
261
Pub. date:
1992
Page(from):
223
Page(to):
228
Pages:
6
Pub. info.:
Pittsburgh, Pa.: Materials Research Society
ISSN:
02729172
ISBN:
9781558991569 [1558991565]
Language:
English
Call no.:
M23500/261
Type:
Conference Proceedings

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