Blank Cover Image

CRYSTALLIZATION KINETICS OF HYDROGENATED AMORPHOUS SILICON DURING PULSED EXCIMER LASER ANNEALING

Author(s):
Publication title:
Amorphous silicon technology, 1992
Title of ser.:
Materials Research Society symposium proceedings
Ser. no.:
258
Pub. Year:
1992
Page(from):
111
Page(to):
116
Pages:
6
Pub. info.:
Pittsburgh, Pa.: Materials Research Society
ISSN:
02729172
ISBN:
9781558991538 [1558991530]
Language:
English
Call no.:
M23500/258
Type:
Conference Proceedings

Similar Items:

1 Conference Proceedings EXCIMER LASER CRYSTALLIZED AMORPHOUS SILICON FILMS: EFFECTS OF SHOT DENSITY AND SUBSTRATE TEMPERATURE

Johnson, R.I., Anderson, G.B., Ready, S.E., Boyce, J.B.

Materials Research Society
7 Conference Proceedings Large grain creation and destruction in excimer laser crystallized amorphous silicon

Boyce, J. B., Anderson, G. B., Fork, D. K., Johnson, R. I., Mei, P., Ready, S. E.

MRS - Materials Research Society
2 Conference Proceedings EXCIMER LASER INDUCED CRYSTALLIZATION OF AMORPHOUS SILICON NEAR THRESHOLD

Bachrach, R.Z., Winer, K., Boyce, J.B., Ponce, F.A., Ready, S.E., Johnson, R., Anderson, G.B.

Materials Research Society
8 Conference Proceedings LOW TEMPERATURE CRYSTALLIZATION OF AMORPHOUS SILICON FILMS USING AN EXCIMER LASER

Ready, S. E., Boyce, J. B., Bachrach, R. Z., Johnson, R. I., Winer, K., Anderson, G., Tsai, C. C.

Materials Research Society
3 Conference Proceedings PULSED LASER CRYSTALLIZATION OF AMORPHOUS SILICON FILMS: EFFECTS OF SUBSTRATE TEMPERATURE AND LASER SHOT DENSITY

Johnson, R.I., Anderson, G.B., Ready, S.E., Fork, D.K., Boyce, J.B.

Materials Research Society
9 Conference Proceedings Laser Doping for Self-aligned Amorphous Silicon Thin Film Transistors

Mei, P., Anderson, G.B., Boyce, J.B., Fork, D.K., Lujan, R.

Electrochemical Society
4 Conference Proceedings FAST-PULSE EXCIMER-LASER-INDUCED PROCESSS IN a-Si:H

Winer, K., Bachrach, R.Z., Johnson, R.I., Ready, S.E., Anderson, G.B., Boyce, J.B.

Materials Research Society
10 Conference Proceedings EFFECTS OF ANNEALING TIME AND TEMPERATURE ON HYDROGEN IN DOPED AND INTRINSIC AMORPHOUS SILICON

Ready, S.E., Boyce, J.B.

Materials Research Society
5 Conference Proceedings CRITICAL LASER FLUENCE OBSERVED IN (111) TEXTURE, GRAIN SIZE AND MOBILITY OF LASER CRYSTALLIZED AMORPHOUS SILICON

Johnson, R.I., Anderson, G.B., Boyce, J.B., Fork, D.K., Mei, P., Ready, S.E., Chen, S.

Materials Research Society
11 Conference Proceedings Microstructure of hydrogen and dopants in hydrogenated amorphous Si

Boyce,J.B., Ready,S.E.

Trans Tech Publications
6 Conference Proceedings LASER DEHYDROGENATION OF PECVD AMORPHOUS SILICON

Mei, P., Boyce, J.B., Hack, M., Lujan, R.A., Johnson, R.I., Anderson, G.B., Fork, D.K., Ready, S.E., Smith, D.L.

Materials Research Society
12 Conference Proceedings CHARACTERIZATION OF THE SUBSTRATE INTERFACE OF EXCIMER LASER CRYSTALLIZED POLYCRYSTALLINE SILICON THIN FILMS

Anderson, G. B., Boyce, J. B., Fork, D. K., Johnson, R. I., Mei, P., Ready, S. E.

MRS - Materials Research Society
1
 
2
 
3
 
4
 
5
 
6
 
7
 
8
 
9
 
10
 
11
 
12