COMPARISON OF a-Si:H FILMS PREPARED BY RP- AND CONVENTIONAL P-CVD

COMPARISON OF a-Si:H FILMS PREPARED BY RP- AND CONVENTIONAL P-CVD

Author(s):

Kim, S.C.

Publication title:

Amorphous silicon technology, 1992

Title of ser.:

Materials Research Society symposium proceedings

Ser. no.:

258

Pub. Year:

1992

Page(from):

51

Page(to):

56

Pages:

6

Pub. info.:

Pittsburgh, Pa.: Materials Research Society

ISSN:

02729172

ISBN:

9781558991538 [1558991530]

Language:

English

Call no.:

M23500/258

Type:

Conference Proceedings

Details

TDL ID:	ZA00015742
Series ID:	PA00000011
Conf. info. (Name):	Amorphous Silicon Technology : Symposium
Conf. info. (Number):	1992
Conf. info. (Venue):	San Francisco, CA, USA
Conf. info. (Date):	1992.04.27-1992.05.01

Similar Items:

1 Conference Proceedings * IMPROVED AMORPHOUS SILICON SOLAR CELLS USING RPCVD Park, K.C., Kim, T.G., Kim, S.K., Kim, S.C., Hwang, M.H., Jun, J.M., Jang, J. Materials Research Society	7 Conference Proceedings EFFECTS OF INDIUM ON THE PROPERTIES OF N-TYPE CdS THIN FILMS DEPOSITED BY SPRAY PYROLYSIS Kim, Y.T., Park, S.C., Chung, S.K. Materials Research Society
2 Conference Proceedings EFFECTS OF HYDROGEN RADICAL ANNEALING ON ELECTRICAL PROPERTIES OF AMORPHOUS SILICON Jang, J., Kim, T.G., Koh, S.O., Song, H.K., Park, K.C., Chung, M.H., Kim, S.C., Kwon, J.H., Kim, J.D. Materials Research Society	8 Conference Proceedings Fabrication of Undoped and N+ Microcrystalline Si Films Using SiH2Cl2 Byun, J. S., Jeon, H. B., Jun, J. M., Yoo, J. H., Lee, K. H., Park, M., Jang, J. MRS - Materials Research Society
3 Conference Proceedings HYDROGENATED SILICON FILMS PREPATED BY REMOTE PLASMA CVD Kim, S. C, Lee, S. K., Soe, S. M., Koh, S. O., Ihm, S. S., Jun, J. M., Kim, T. G., Chung, M. H., Lee, K. H., Song, H. … Materials Research Society	9 Conference Proceedings THERMAL EQUILIBRIUM IN a-Si:H N+-P-P+ and P+-N-N+ STRUCTURES Jang, J., Lee, Y.K., Lee, Y.S., Jun, J.M., Lee, C. Materials Research Society
4 Conference Proceedings "Comparison of a-Si:H Csl flat-panel digital imaging systems with a CCD-based system, CR systems, and conventional screen-film systems: a contrast-detail … Rong,J.X., Shaw,C.C., Johnston,D.A., Lemacks,M.R., Liu,X., Whitman,G.J., Thompson,S.K., Krugh,K.T. SPIE-The International Society for Optical Engineering	10 Conference Proceedings Properties of Tin Oxide Films Prepared by MOCVD Choi, G.P., Park, Y.J., Noh, W.S., Park, J.S. Trans Tech Publications
5 Conference Proceedings EFFECTS OF EXCIMER LASER IRRADIATION ON THE CHARACTERISTICS OF a-Si:H TFT’s Lee, S.K., Oh, C.H., Kim, Y.S., Park, J.S., Han, M.K. Materials Research Society	11 Conference Proceedings Minimization of DUV multi-interference effect in 0.25-ｦﾌm device fabrication Kim,J.H., Moon,S.C., Ko,B.S., Park,J.H., Lee,T.G., Shin,K.S., Kim,D.H. SPIE-The International Society for Optical Engineering
6 Conference Proceedings High Performance a-Si:H(:Cl) TFT Kim, S.K., Lee, K.S., Choi, J.H., Kim, C.S., Jang, J. Electrochemical Society	12 Conference Proceedings ENHANCED DEPOSITION RATE OF CVD DIAMOND IN A DC ARCJET WiTH A SECONDARY DISCHARGE Baldwin, S.K., Owano, T.G., Jr., Kruger, C.H. Electrochemical Society

1

2

3

4

5

6

7

8

9

10

11

12