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STRUCTURAL CHARACTERIZATION OF POROUS SILICON FABRICATED BY ELECTROCHEMICAL AND CHEMICAL DISSOLUTION OF Si WAFERS

Author(s):
Miyazaki, S.
Yasaka, T.
Okamoto, K.
Shiba, K.
Sakamoto, K.
Hirose, M.
1 more
Publication title:
Light emission from silicon : symposium held December 3-5, 1991, Boston, Massachusetts, U.S.A.
Title of ser.:
Materials Research Society symposium proceedings
Ser. no.:
256
Pub. date:
1992
Page(from):
185
Page(to):
188
Pages:
4
Pub. info.:
Pittsburgh, Pa.: Materials Research Society
ISSN:
02729172
ISBN:
9781558991507 [1558991506]
Language:
English
Call no.:
M23500/256
Type:
Conference Proceedings

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