INVESTIGATION OF Pt BOTTOM ELECTRODES FOR "IN-SITU" DEPOSITED Pb(Zr,Ti)O3 (PZT) THIN FILMS

INVESTIGATION OF Pt BOTTOM ELECTRODES FOR "IN-SITU" DEPOSITED Pb(Zr,Ti)O3 (PZT) THIN FILMS

Author(s):

Publication title:

Ferroelectric thin films II : symposium held December 2-4, 1991, Boston, Massachusetts, U.S.A.

Title of ser.:

Materials Research Society symposium proceedings

Ser. no.:

243

Pub. Year:

1992

Page(from):

123

Page(to):

128

Pages:

6

Pub. info.:

Pittsburgh, Pa.: Materials Research Society

ISSN:

02729172

ISBN:

9781558991378 [1558991379]

Language:

English

Call no.:

M23500/243

Type:

Conference Proceedings

Details

TDL ID:	ZA00015727
Series ID:	PA00000011
Conf. info. (Name):	Symposium on ferroelectric thin films
Conf. info. (Number):	2nd
Conf. info. (Venue):	Boston, MA, USA
Conf. info. (Date):	1991.12.02-1991.12.04

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