FABRICATION OF HEMT-ON-Si BY MOVPE FOR LSI APPLICATIONS

FABRICATION OF HEMT-ON-Si BY MOVPE FOR LSI APPLICATIONS

Author(s):

Publication title:

Advanced III-V compound semiconductor growth, processing and devices : symposium held Decmber[i.e. December] 2-5, 1991, Boston, Massachusetts, U.S.A.

Title of ser.:

Materials Research Society symposium proceedings

Ser. no.:

240

Pub. Year:

1992

Page(from):

505

Page(to):

510

Pages:

6

Pub. info.:

Pittsburgh, Pa.: Materials Research Society

ISSN:

02729172

ISBN:

9781558991347 [1558991344]

Language:

English

Call no.:

M23500/240

Type:

Conference Proceedings

Details

TDL ID:	ZA00015724
Series ID:	PA00000011
Conf. info. (Name):	Symposium on advanced III-V compound semiconductor growth, processing and devices
Conf. info. (Number):	1991
Conf. info. (Venue):	Boston, MA, USA
Conf. info. (Date):	1991.12.02-1991.12.05

Similar Items:

1 Conference Proceedings MOVPE GROWTH OF GaAs ON Si USING TERTIARYBUTYLARSINE Miyagaki, S., Ohkubo, S., Takai, K., Takagi, N., Kimura, M., Kikuchi, Y., Eshita, T., Takasaki, K. Materials Research Society	7 Conference Proceedings Advanced Millisecond Annealing Technologies and its Applications and Concerns on Advanced Logic LSI Fabrication Processes M. Kase, T. Yamamoto, T. Kubo Trans Tech Publications
2 Conference Proceedings CRYSTAL QUALITY AND SURFACE MORPHOLOGY IMPROVEMENT OF MOVPE-GROWN GaAs-ON-Si USING TERTIARYBUTYLARSINE Miyagaki, S., Ohkubo, S., Takai, K., Takagi, N., Kimura, M., Kikuchi, Y., Eshita, T., Takasaki, K. Materials Research Society	8 Conference Proceedings 0.1 μm AlGaAs/InGaAs HEMT Fabrication by UV-Lithography Tanabe, M., Matsuno, T., Sakai, H., Yanagihara, M., Inoue, K., Tamura, A. Electrochemical Society
3 Conference Proceedings DIRECT OBSERVATION OF INTERFACE TRAPS IN OMVPE-GROWTH SELECTIVELY DOPED A1GaAs/GaAs HETEROSTRUCTURE USING MODIFIED DLTS Takikawa, M., Oohori, T., Kasai, K., Komeno, J., Shibatonti, A. Materials Research Society	9 Conference Proceedings lnP-Based HEMT Technology for MMIC Applications Van Hove, M., Finders, J., van der Zanden, K., De Raedt, W., Van Rossum, M., Baeyens, Y., Schreurs, D., Nauwelaers, B., … Electrochemical Society
4 Conference Proceedings Influence of Negative Charging on High Rate SiC Etching for GaN HEMT MMICs N. Okamoto, K. Imanishi, T. Kikkawa, N. Nara Trans Tech Publications	10 Conference Proceedings Photoionization of Deep Traps in AlGaAs/GaAs Quantum Wells Takikawa,M., Kelting,K., Brunthaler,G., Takechi,M., Komeno,J. Trans Tech Publications
5 Conference Proceedings A novel fabrication technology of a polymer optical waveguide and its application A. Fujii, T. Suzuki, K. Shimizu, K. Yatsuda, M. Igusa Society of Photo-optical Instrumentation Engineers	11 Conference Proceedings Initial Stage of the Delithiation of Li_1.2-xMn_0.4Fe_0.4O₂ Positive Electrode Material for Lithium-Ion Batteries … J. Kikkawa, T. Akita, M. Tabuchi, M. Shikano, K. Tatsumi Electrochemical Society
6 Conference Proceedings InP HBT and HEMT Technology and Applications Gutierrez-Airken, A., Oki, A.K., Streit, D.C., Lai, R., Sawdai, D., Chen, Y C., Kaneshiro, E., Grundbache, R., Grossman, … Electrochemical Society	12 Conference Proceedings Surface Stabilization for higher performance AlGaN/GaN HEMT with in-situ MOVPE SiN Germain, M., Leys, M., Derluyn, J., Boeykens, S., Degroote, S., Ruythooren, W., Das, J., Vandersmissen, R., Xiao, D. P., … Materials Research Society

1

2

3

4

5

6

7

8

9

10

11

12