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LOW-TEMPERATURE DEVICE-QUALITY SiO2/Si (100) INTERFACES PREPARED BY A COMBINED REMOTE PLASMA OXIDATION-DEPOSITION PROCESS

Author(s):
Publication title:
Structure and properties of interfaces in materials : symposium held Decmber[i.e. December] 2-5, 1991, Boston, Massachusetts, U.S.A.
Title of ser.:
Materials Research Society symposium proceedings
Ser. no.:
238
Pub. Year:
1992
Page(from):
713
Page(to):
720
Pages:
8
Pub. info.:
Pittsburgh: Materials Research Society
ISSN:
02729172
ISBN:
9781558991323 [1558991328]
Language:
English
Call no.:
M23500/238
Type:
Conference Proceedings

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