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IN-SITU STUDIES OF THE FORMATION SEQUENCE OF SILICIDES DURING VACUUM (10-7 TORR) THERMAL ANNEALING OF Ti/POLYSILICON BILAYERS

Author(s):
Publication title:
Interface dynamics and growth : symposium held December 2-6, 1991, Boston, Massachusetts, U.S.A.
Title of ser.:
Materials Research Society symposium proceedings
Ser. no.:
237
Pub. Year:
1992
Page(from):
661
Page(to):
666
Pages:
6
Pub. info.:
Pittsburgh, Pa.: Materials Research Society
ISSN:
02729172
ISBN:
9781558991316 [155899131X]
Language:
English
Call no.:
M23500/237
Type:
Conference Proceedings

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