Blank Cover Image

PLASMA SURFACE INTERACTION DURING THE GROWTH OF SEMICONDUCTOR THIN FILMS STUDIED BY IN SITU INFRARED ELLIPSOMETRY

Author(s):
Publication title:
Interface dynamics and growth : symposium held December 2-6, 1991, Boston, Massachusetts, U.S.A.
Title of ser.:
Materials Research Society symposium proceedings
Ser. no.:
237
Pub. Year:
1992
Page(from):
631
Page(to):
636
Pages:
6
Pub. info.:
Pittsburgh, Pa.: Materials Research Society
ISSN:
02729172
ISBN:
9781558991316 [155899131X]
Language:
English
Call no.:
M23500/237
Type:
Conference Proceedings

Similar Items:

1 Conference Proceedings Analysis of Vibrational Properties of Thin Films Using In Situ Infrared Ellipsometry: Applications to Polymerlike Amorphous Carbon Films

Heitz, T., Drevillon, B., Godet, C., Bouree, J. E., Clerc, C.

MRS - Materials Research Society
7 Conference Proceedings IN-SITU ELLIPSOMETRY STUDY OF AMORPHOUS SILICON INTERFACES

Antoine, A.M., Drevillon, B., Godet, C.

Materials Research Society
2 Conference Proceedings Process monitoring of semiconductor thin films and interfaces by spectroellipsometry

Brenot,R., Drevillon,B.

SPIE - The International Society for Optical Engineering
8 Conference Proceedings INFRARED ELLIPSOMETRY STUDY OF ORIENTED LANGMUIR-BLODGETT MONOLAYERS

Benferhat, R., Drevillon, B., Robin, P.

Materials Research Society
3 Conference Proceedings IN-SITU INVESTIGATION OF AMORPHOUS SILICON/SILICON NITRIDE INTERFACES BY INFRARED ELLIPSOMETRY

Shirai, H., Drevillon, B., Ossikovski, R.

Materials Research Society
9 Conference Proceedings INFLUENCE OF ION BOMBARDMENT ON THE NUCLEATION AND GROWTH OF PLASMA DEPOSITED AMORPHOUS SILICON

Antoine, A.M., Drevillon, B.

Materials Research Society
4 Conference Proceedings * IN SITU MONITORING OF INTERFACES AND GROWTH OF AMORPHOUS SILICON BY SPECTROELLIPSOMETRY

Drevillon, B.

Materials Research Society
10 Conference Proceedings Application of Fourier-transform infrared ellipsometry to quantify bioloical molecules in animal tissues

Garcia-Caurel, E., Drevillon, B., Schwartz, L.

SPIE-The International Society for Optical Engineering
5 Conference Proceedings Physics of Glow Discharge Plasma/Surface Interactions During Thin Film Growth

Sundgren J-E.

Plenum Press
11 Conference Proceedings In Situ Investigation of the Low Pressure MOCVD Growth of Lattice-Mismatched Semiconductors using Reflectance Anisotropy Measurements

Acher O., Koch S. M., Omnes F., Defour M., Drevillon B., Razeghi M.

Plenum Press
6 Conference Proceedings Spectroellipsometric Method for Process Monitoring of Semiconductor Thin Films and Interfaces

Brenot,R., Kildemo,M., Drevillon,B.

Trans Tech Publications
12 Conference Proceedings IN SITU STUDIES OF ELECTRON CYCLOTRON RESONANCE PLASMA ETCHING OF SEMICONDUCTORS BY SPECTROSCOPIC ELLIPSOMETRY

Nafis, S., Ianno, N.J., Snyder, Paul G., Woollam, John A., Johs, Blaine

Materials Research Society
1
 
2
 
3
 
4
 
5
 
6
 
7
 
8
 
9
 
10
 
11
 
12