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EBIC INVESTIGATION OF ETCH INDUCED DEFECTS IN SILICON INTRODUCED BY RIE AND RIBE

Author(s):
Publication title:
Photons and low energy particles in surface processing : symposium held Decmber[i.e. December] 3-6, 1991, Boston, Massachusetts, U.S.A.
Title of ser.:
Materials Research Society symposium proceedings
Ser. no.:
236
Pub. date:
1992
Page(from):
211
Page(to):
216
Pages:
6
Pub. info.:
Pittsburgh, Pa.: Materials Research Society
ISSN:
02729172
ISBN:
9781558991309 [1558991301]
Language:
English
Call no.:
M23500/236
Type:
Conference Proceedings

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