NANOMETER LITHOGRAPHY BY FAST ATOM OR ION BEAM MILLING
- Author(s):
- Publication title:
- Photons and low energy particles in surface processing : symposium held Decmber[i.e. December] 3-6, 1991, Boston, Massachusetts, U.S.A.
- Title of ser.:
- Materials Research Society symposium proceedings
- Ser. no.:
- 236
- Pub. Year:
- 1992
- Page(from):
- 171
- Page(to):
- 176
- Pages:
- 6
- Pub. info.:
- Pittsburgh, Pa.: Materials Research Society
- ISSN:
- 02729172
- ISBN:
- 9781558991309 [1558991301]
- Language:
- English
- Call no.:
- M23500/236
- Type:
- Conference Proceedings
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