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XPS AND FTIR STUDY OF THE THIN POLYIMIDE FILMS FABRICATED BY IONIZED CLUSTER BEAM DEPOSITION

Author(s):
Kim, K. W.
Chae, K. H.
Choi, S. C.
Cho, S. J.
Vahe, Y. W.
Whang, C. N.
Jung, H. J.
Lee, D. H.
Lee, J. K.
4 more
Publication title:
Phase formation and modification by beam-solid interactions : symposium held December 2-6, 1991, Boston, Massachusetts, U.S.A.
Title of ser.:
Materials Research Society symposium proceedings
Ser. no.:
235
Pub. Year:
1992
Page(from):
627
Page(to):
634
Pages:
8
Pub. info.:
Pittsburgh, Pa.: Materials Research Society
ISSN:
02729172
ISBN:
9781558991293 [1558991298]
Language:
English
Call no.:
M23500/235
Type:
Conference Proceedings

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