Blank Cover Image

IN-SITU TEM OBSERVATION OF DEFECTS AND AMORPHOUS PHASE IN Si WAFER DURING ION IMPLANTATION

Author(s):
Shigenaka, Naoto
Hashimoto, Tuneyuki
Fuse, Motomasa
Owada, Nobuo
Yamaguchi, Hizuru
Ozono, Seiko
1 more
Publication title:
Phase formation and modification by beam-solid interactions : symposium held December 2-6, 1991, Boston, Massachusetts, U.S.A.
Title of ser.:
Materials Research Society symposium proceedings
Ser. no.:
235
Pub. Year:
1992
Page(from):
71
Page(to):
76
Pages:
6
Pub. info.:
Pittsburgh, Pa.: Materials Research Society
ISSN:
02729172
ISBN:
9781558991293 [1558991298]
Language:
English
Call no.:
M23500/235
Type:
Conference Proceedings

Similar Items:

1 Conference Proceedings TEM Observation of Defect Structure of Low-Energy Ion Implanted SiC

T. Kameda, A. Tomita, T. Matsui, T. Isshiki

Trans Tech Publications
7 Conference Proceedings AMORPHOUS PHASE TRANSFORMATION DURING RAPID THERMAL ANNEALING OF ION-IMPLANTED Si

Kirillov, D., Powell, R.A., Hodul, D.T.

Materials Research Society
2 Conference Proceedings Corrosion Control in Copper Damascene Process

Homma, Yashio, Kondo, Seiichi, Sakuma, Noriyuki, Hinode, Kenji, Noguchi, Junji, Ohashi, Naofumi, Yamaguchi, Hizuru, …

Electrochemical Society
8 Conference Proceedings TEM OBSERVATION OF THE DAMAGES IN HEAVILY ION-IMPLANTED FINE Si COLUMNS

Shingubara, S., Sukesako, H., Kawasaki, T., Inoue, K., Matusi, Y., Sakaue, H., Takahagi, T., Horiike, Y.

MRS - Materials Research Society
3 Conference Proceedings IN-SITU CONTROL OF WAFER CHARGE NEUTRALIZATION DURING HIGH CURRENT ION IMPLANTS

Shauly, E. N., Koltin, E., Munin, I., Avrahamov, Y.

MRS - Materials Research Society
9 Conference Proceedings Difference in Secondary Defects Between High Energy B+ and Al+ Implanted 4H-SiC

Ohno, Toshiyuki, Kobayashi, Naoto

Materials Research Society
4 Conference Proceedings In Situ TEM Observation of Precipitation of Zirconium Hydrides in Zircaloy-4 under Hydrogen Ion Implantation

Y. Shinohara, H. Abe, T. Kido, T. Iwai, N. Sekimura

Trans Tech Publications
10 Conference Proceedings Ion-Implanted Amorphous Silicon Studied by Variable Coherence TEM

Cheng, J-Y., Gibson, J. M., Jacobson, D. C., Treacy, M. M. J., Voyles, P. M.

Materials Research Society
5 Conference Proceedings Development of an ion implanter for SIMOX wafer volume production

Takiguchi, K, Yamashita, Y, Seki, T, Hashimoto, I

Electrochemical Society
11 Conference Proceedings Phase Transitions at the Amorphous / Crystalline Interface in Ion-implanted Silicon and their Role in End-of-Range Defect Formation

Seibt,M., Imschweiler,J., Hefiler,H.-A.

Trans Tech Publications
6 Conference Proceedings In-Situ TEM Observation for Dehydrogenation Mechanism in MgH2 with Catalyst

E. Morita, A. Ono, S. Isobe, Y.M. Wang, N. Hashimoto

Trans Tech Publications
12 Conference Proceedings IN-SITU REFLECTANCE MEASUREMENTS OF SEMICONDUCTORS DURING ION IMPLANTATION

Swart, Pieter L., Macquet,. Bea M., Grobler, Michael F.

Materials Research Society
1
 
2
 
3
 
4
 
5
 
6
 
7
 
8
 
9
 
10
 
11
 
12