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SECONDARY GRAIN GROWTH IN HEAVILY DOPED POLYSILICON DURING RAPID THERMAL ANNEALING

Author(s):
Publication title:
Phase transformation kinetics in thin films : symposium held April 29-May 1, 1991, Anaheim, California, U.S.A.
Title of ser.:
Materials Research Society symposium proceedings
Ser. no.:
230
Pub. Year:
1992
Page(from):
201
Page(to):
206
Pages:
6
Pub. info.:
Pittsburgh, Pa.: Materials Research Society
ISSN:
02729172
ISBN:
9781558991248 [1558991247]
Language:
English
Call no.:
M23500/230
Type:
Conference Proceedings

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