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PROTONATION EFFECTS ON PPQ POLYMER DURING HF LIFT-OFF PROCESS USED IN MULTICHIP MODULE FABRICATION

Author(s):
Publication title:
Materials science of high temperature polymers for microelectronics : symposium held April 29-May 2, 1991, Anaheim, California, U.S.A.
Title of ser.:
Materials Research Society symposium proceedings
Ser. no.:
227
Pub. Year:
1991
Page(from):
273
Page(to):
280
Pages:
8
Pub. info.:
Pittsburgh, Pa.: Materials Research Society
ISSN:
02729172
ISBN:
9781558991217 [1558991212]
Language:
English
Call no.:
M23500/227
Type:
Conference Proceedings

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