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ELECTRICAL PROPERTIES OF THIN POLYIMIDE FILMS PREPARED BY IONIZED CLUSTER BEAM DEPOSITION

Author(s):
Publication title:
Materials science of high temperature polymers for microelectronics : symposium held April 29-May 2, 1991, Anaheim, California, U.S.A.
Title of ser.:
Materials Research Society symposium proceedings
Ser. no.:
227
Pub. date:
1991
Page(from):
225
Page(to):
230
Pages:
6
Pub. info.:
Pittsburgh, Pa.: Materials Research Society
ISSN:
02729172
ISBN:
9781558991217 [1558991212]
Language:
English
Call no.:
M23500/227
Type:
Conference Proceedings

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