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CONTROL OF MICROSTRUCTURE AND STRESS IN SPUTTERED TUNGSTEN THIN FILMS ON SILICON

Author(s):
Publication title:
Mechanical behavior of materials and structures in microelectronics : symposium held April 30-May 3, 1991, Anaheim, California, U.S.A.
Title of ser.:
Materials Research Society symposium proceedings
Ser. no.:
226
Pub. Year:
1991
Page(from):
235
Page(to):
240
Pages:
6
Pub. info.:
Pittsburgh, Pa.: Materials Research Society
ISSN:
02729172
ISBN:
9781558991200 [1558991204]
Language:
English
Call no.:
M23500/226
Type:
Conference Proceedings

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