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GROWTH AND MICROSTRUCTURE OF ALUMINUM NITRIDE THIN FILMS

Author(s):
Norton, M. Grant
Kotula, Paul G.
Li, Jian
McKernan, Stuart
Cracknell, , Kathryn P. B.
Carter, C. Barry
Mayer, James W.
2 more
Publication title:
Mechanical behavior of materials and structures in microelectronics : symposium held April 30-May 3, 1991, Anaheim, California, U.S.A.
Title of ser.:
Materials Research Society symposium proceedings
Ser. no.:
226
Pub. Year:
1991
Page(from):
209
Page(to):
214
Pages:
6
Pub. info.:
Pittsburgh, Pa.: Materials Research Society
ISSN:
02729172
ISBN:
9781558991200 [1558991204]
Language:
English
Call no.:
M23500/226
Type:
Conference Proceedings

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