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MULTI-STEP RAPID THERMAL ANNEALING TO IMPROVE THE STRUCTURAL AND ELECTRICAL PROPERTIES OF GaAs ON Si

Author(s):
Zou, G.
De Boeck, J.
de Potter, M.
Deneffe, K.
de Wolf, I.
Vanhellemont, J.
Borghs, G.
Van Rossum, M.
3 more
Publication title:
Rapid thermal and integrated processing : symposium held April 30-May 3, 1991, Anaheim, California, U.S.A.
Title of ser.:
Materials Research Society symposium proceedings
Ser. no.:
224
Pub. Year:
1991
Page(from):
479
Page(to):
486
Pages:
8
Pub. info.:
Pittsburgh, Pa.: Materials Research Society
ISSN:
02729172
ISBN:
9781558991187 [1558991182]
Language:
English
Call no.:
M23500/224
Type:
Conference Proceedings

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