Blank Cover Image

*REFRACTORY OHMIC CONTACTS TO InP AND RELATED MATERIALS FORMED BY RAPID THERMAL PROCESSING

Author(s):
Katz, Avishay  
Publication title:
Rapid thermal and integrated processing : symposium held April 30-May 3, 1991, Anaheim, California, U.S.A.
Title of ser.:
Materials Research Society symposium proceedings
Ser. no.:
224
Pub. Year:
1991
Page(from):
433
Page(to):
444
Pages:
12
Pub. info.:
Pittsburgh, Pa.: Materials Research Society
ISSN:
02729172
ISBN:
9781558991187 [1558991182]
Language:
English
Call no.:
M23500/224
Type:
Conference Proceedings

Similar Items:

1 Conference Proceedings Rapid thermal low pressure metalorganic chemical vapor deposition of InP and related materials

Katz, A., Feingold, A.

MRS - Materials Research Society
7 Conference Proceedings Properties of Au/Pt/Ti contact to p-InP by rapid thermal processing

Y. Lv, H. Tang, B. Han, X. Wu, K. Zhang

Society of Photo-optical Instrumentation Engineers
2 Conference Proceedings ON THE CONTACTS FORMED IN Ni-Al-Si SYSTEM DUE TO LOCALIZED MELTING BY MEANS OF RAPID THERMAL PROCESSING

Katz, A., Komem, Y.

Materials Research Society
8 Conference Proceedings Role of Hydrogen in Semiconductor,Dielectric and Metal Deposition onto InP by Means of Rapid Thermal Low Pressure Metalorganic Chemical Vapor Deposition

Feingold,A., Katz,A.

Trans Tech Publications
3 Conference Proceedings *FORMATION OF OHMIC CONTACTS TO InP BY MEANS OF RAPID THERMAL LOW PRESSURE (METALORGANIC) CHEMICAL VAPOR DEPOSITION (RT-LPMOCVD) TECHNIQUE

Katz, A., Feingold, A., Pearton, S. J., Nakahara, S., Lane, E., Geva, M.

Materials Research Society
9 Conference Proceedings Ohmic contacts to GaN with rapid thermal annealing

Chi,L.W., Lam,K.T., Kao,Y.K., Juang,F.-S., Tasi,Y.S., Su,Y.K., Chang,S.-J., Chen,C.C., Sheu,J.K.

SPIE - The International Society for Optical Engineering
4 Conference Proceedings *INTERFACIAL MICROSTRUCTURE AND CARRIER CONDUCTION PROCESS IN Pt/Ti OHMIC CONTACT TO p-In0.53Ga0.47As FORMED BY RAPID THERMAL PROCESSING

Chu, S. N. G., Katz, A., Boone, T., Thomas, P. M., Riggs, V. G., Dautremont-Smith, W. C., Johnson Jr., W. D.

Materials Research Society
10 Conference Proceedings Pt/Ti LOW RESISTANCE NON-ALLYED OHMIC CONTACTS TO InP-BASED PHOTONIC DEVICES

Katz, A., Chu, S. N. G., Thomas, P. M, Dautremont-Smith, W. C.

Materials Research Society
5 Conference Proceedings REFRACTORY OHMIC CONTACTS FORMED BY ELECTROLESS DEPOSITION OF PALLADIUM AND NICKEL ONTO N-InP

Stremsdoerfer,. G., Wang, Y., Martin,. J. R., Souteyrand, E.

Materials Research Society
11 Conference Proceedings The Role of Ru in Ohmic Contacts to InP

Barnard, W.O., Myburg, G., Auret, F.D., Ressel, P., Kuphal, E.

Electrochemical Society
6 Conference Proceedings SUSCEPTOR AND PROXIMITY RAPID THERMAL ANNEALING OF InP

Katz, A., Pearton, S. J., Geva, M.

Materials Research Society
12 Conference Proceedings RAPID THERMAL NITRIDATION OF TUNGSTEN-CAPPED SHALLOW OHMIC CONTACTS TO GaAs

Kaminska, E., Piotrowska, A., Mizera, E., Guziewicz, M., Barcz, A., Dynowska, E., Kwiatkowski, S.

MRS - Materials Research Society
1
 
2
 
3
 
4
 
5
 
6
 
7
 
8
 
9
 
10
 
11
 
12