Blank Cover Image

ULTRATHIN OXYNITRIDE GATE DIELECTRIC PREPARED BY RAPID THERMAL OXIDATION IN N2O FOR ULSI APPLICATIONS

Author(s):
Publication title:
Rapid thermal and integrated processing : symposium held April 30-May 3, 1991, Anaheim, California, U.S.A.
Title of ser.:
Materials Research Society symposium proceedings
Ser. no.:
224
Pub. date:
1991
Page(from):
379
Page(to):
384
Pages:
6
Pub. info.:
Pittsburgh, Pa.: Materials Research Society
ISSN:
02729172
ISBN:
9781558991187 [1558991182]
Language:
English
Call no.:
M23500/224
Type:
Conference Proceedings

Similar Items:

Ting, W., Ahn, J., Kwong, D. L.

Materials Research Society

Jung, Hyungsuk, Im, Kiju, Jeon, Sanghun, Yang, Dooyoung, Hwang, Hyunsang

Electrochemical Society

Kwon, Hyungshin, Hwang, Hyunsang

Materials Research Society

Chu, T. Y., Ting, W., Kwong, D. L.

Materials Research Society

Lo, G. Q., Shih, d. K., Ting W., Kwong, D. L.

Materials Research Society

Kim, H., Hwang, H.

MRS - Materials Research Society

Kim,B.Y., Wristers,D., Kwong,D.L.

SPIE-The International Society for Optical Engineering

Kim, J., Yoon, G.W., Lo, G.Q., Ahn, J., Kwong, D.L.

Electrochemical Society

Luan, H. F., Lee, S. J., Lee, C. H., Mao, A. Y., Vrtis, R., Roberts, D., Kwong, D. L.

MRS - Materials Research Society

Han, L.K., Kim, J., Wang, H.H., Yan, J., Kwong, D.L.

Electrochemical Society

Maiti, Bikas, Lee, Jack C.

Materials Research Society

Jung, Hyungsuk, Yang, Hyundoek, Im, Kiju, Hwang, Hyunsang

Materials Research Society

1
 
2
 
3
 
4
 
5
 
6
 
7
 
8
 
9
 
10
 
11
 
12