*IS THERE A WAY TO A PERFECT RAPID THERMAL PROCESSING SYSTEM?

*IS THERE A WAY TO A PERFECT RAPID THERMAL PROCESSING SYSTEM?

Author(s):: Kakoschke, R.
Publication title:: Rapid thermal and integrated processing : symposium held April 30-May 3, 1991, Anaheim, California, U.S.A.
Title of ser.:: Materials Research Society symposium proceedings
Ser. no.:: 224
Pub. Year:: 1991
Page(from):: 159
Page(to):: 170
Pages:: 12
Pub. info.:: Pittsburgh, Pa.: Materials Research Society
ISSN:: 02729172
ISBN:: 9781558991187 [1558991182]
Language:: English
Call no.:: M23500/224
Type:: Conference Proceedings

Details

TDL ID:	ZA00015708
Series ID:	PA00000011
Conf. info. (Name):	Symposium on rapid thermal and integrated processing
Conf. info. (Number):	1991
Conf. info. (Venue):	Anaheim, CA, USA
Conf. info. (Date):	1991.04.30-1991.05.03

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