PLASMA ENHANCED OMCVD ATOMIC LAYERED GROWTH OF Y-Ba-Cu OXIDE FILMS

PLASMA ENHANCED OMCVD ATOMIC LAYERED GROWTH OF Y-Ba-Cu OXIDE FILMS

Author(s):

Duray, S. J.

Publication title:

Atomic layer growth and processing : symposium held April 29 - May 1, 1991, Anaheim, California, U.S.A.

Title of ser.:

Materials Research Society symposium proceedings

Ser. no.:

222

Pub. Year:

1991

Page(from):

303

Page(to):

308

Pages:

6

Pub. info.:

Pittsburgh: Materials Research Society

ISSN:

02729172

ISBN:

9781558991163 [1558991166]

Language:

English

Call no.:

M23500/222

Type:

Conference Proceedings

Details

TDL ID:	ZA00015706
Series ID:	PA00000011
Conf. info. (Name):	Symposium on atomic layer growth and processing
Conf. info. (Number):	1991
Conf. info. (Venue):	Anaheim, CA, USA
Conf. info. (Date):	1991.04.29-1991.05.01

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