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TEM EVALUATION OF AlAs/Si HETEROSTRUCTURES GROWN BY ATOMIC LAYER EPITAXY

Author(s):
Publication title:
Heteroepitaxy of dissimilar materials : symposium held April 29-May 2, 1991, Anaheim, California, U.S.A.
Title of ser.:
Materials Research Society symposium proceedings
Ser. no.:
221
Pub. Year:
1991
Page(from):
393
Page(to):
398
Pages:
6
Pub. info.:
Pittsburgh, Pa.: Materials Research Society
ISSN:
02729172
ISBN:
9781558991156 [1558991158]
Language:
English
Call no.:
M23500/221
Type:
Conference Proceedings

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