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FABRICATION OF BOND AND ETCH BACK SILICON ON INSULATOR USING SiGe-MBE AND SELECTIVE ETCHING TECHNIQUES

Author(s):
Godbey, D.
Palkuti, L.
Leonov, P.
Krist, A.
Wang, J.
Twigg, M.
Hughes, H.
Hobart, K.
3 more
Publication title:
Silicon molecular beam epitaxy : symposium held April 29-May 3, 1991, Anaheim, California, U.S.A.
Title of ser.:
Materials Research Society symposium proceedings
Ser. no.:
220
Pub. date:
1991
Page(from):
291
Page(to):
298
Pages:
8
Pub. info.:
Pittsburgh, Pa.: Materials Research Society
ISSN:
02729172
ISBN:
9781558991149 [155899114X]
Language:
English
Call no.:
M23500/220
Type:
Conference Proceedings

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