Blank Cover Image

LOW TEMPERATURE IN-SITU PROCESSING FOR Si-MBE

Author(s):
Publication title:
Silicon molecular beam epitaxy : symposium held April 29-May 3, 1991, Anaheim, California, U.S.A.
Title of ser.:
Materials Research Society symposium proceedings
Ser. no.:
220
Pub. Year:
1991
Page(from):
15
Page(to):
20
Pages:
6
Pub. info.:
Pittsburgh, Pa.: Materials Research Society
ISSN:
02729172
ISBN:
9781558991149 [155899114X]
Language:
English
Call no.:
M23500/220
Type:
Conference Proceedings

Similar Items:

1 Conference Proceedings SINGLE STEP LOW TEMPERATURE IN-SITU SUBSTRATE CLEANING FOR SILICON PROCESSING

Ramm, Juergen, Beck, Eugen, Steiner, Franz-Peter, Pixley, Ralph E., Eisele, Ignaz

Materials Research Society
7 Conference Proceedings LOW-TEMPERATURE EPITAXIAL GROWTH OF GaAs ON Si SUBSTRATES BY MBE

Chiang, Ting-Yen, Liu, En-Huery, Yiin, Der-Hwa, Yew, Tri-Rung

Materials Research Society
2 Conference Proceedings DRY HYDROGEN PLASMA CLEANING FOR LOCAL EPITAXIAL GROWTH

Ramm, Juergen, Beck, Eugen, Eisele, Ignaz, Hansch, Walter, Klepser, Bernd-Ulrich, Senn, Hans

MRS - Materials Research Society
8 Conference Proceedings DEFECTS IN LOW-TEMPERATURE-GROWN MBE GaAs

Look, David C.

MRS - Materials Research Society
3 Conference Proceedings Results of In-House Cone-Cup Testing of Low to High Temperature SPF-Alloys

Beck, W.

Trans Tech Publications
9 Conference Proceedings Defects in Low-Temperature MBE-Grown Si and SiGe/Si Structures

Chen, W. M., Buyanova, I. A., Monemar, B.

MRS - Materials Research Society
4 Conference Proceedings In-Situ Processing Combining MBE, Lithography and Ion-Implantation

Ahmed H.

Martinus Nijihoff Publishers
10 Conference Proceedings Sulfur at High Pressure and Low Temperatures

Eckert B., Jodl -J. H., Albert O. H., Foggi P.

Plenum Press
5 Conference Proceedings IN SITU PROCESS FOR PERIODIC CLEANING OF LOW TEMPERATURE NITRIDE FURNACES

Foster, D., Herring, R., Ellenberg, J., Johnson, A., Hartz, C.

Electrochemical Society
11 Conference Proceedings IN SITU SUBSTRATE TEMPERATURE MEASUREMENT DURING MBE BY BAND-EDGE REFLECTION SPECTROSCOPY

Roth, J. A., Lyon, T. J. de, Adel, M. E.

MRS - Materials Research Society
6 Conference Proceedings 3D Process Integration - Requirements and Challenges

Juergen Max Wolf, Armin Klumpp, Kai Zoschke, Robert Wieland, Lars Nebrich, Matthias Klein, Hermann Oppermann, Peter …

Materials Research Society
12 Conference Proceedings PROBLEMS OF CONTAMINATION PRIOR AND DURING Si-MBE

Lippert, G., Kruger, D., Zeindl, H. P., Ramm, J., Bugiel, E., Osten, H. J.

MRS - Materials Research Society
1
 
2
 
3
 
4
 
5
 
6
 
7
 
8
 
9
 
10
 
11
 
12