Blank Cover Image

THE SLOPE ETCHING OF a-Si:H FILM USING CF4 + O2 GAS

Author(s):
Sung, K.H.
Park, B.W.
Kim, J.I.
Kim, J.J.
Bae, H.K.
Park, Y.H.
Hur, C.W.
2 more
Publication title:
Amorphous silicon technology 1991 : symposium held April 30-May 3, 1991, Anaheim, California, U.S.A.
Title of ser.:
Materials Research Society symposium proceedings
Ser. no.:
219
Pub. date:
1991
Page(from):
811
Page(to):
818
Pages:
8
Pub. info.:
Pittsburgh, Pa.: Materials Research Society
ISSN:
02729172
ISBN:
9781558991132 [1558991131]
Language:
English
Call no.:
M23500/219
Type:
Conference Proceedings

Similar Items:

Park, H.-H., Kwon, K.H., Koak, B.-H., Lee, S.-M., Kwon, O-J., Kim, B.-W., Lee, J.-W., Yoo, J.-B., Sung, Y.-K.

Materials Research Society

Chai, S.Y., Park, J.K., Kim, H.K., Lee, W.I.

Trans Tech Publications

Chung, C.W., Byun, Y.H., Kim, H.I.

Electrochemical Society

Park, B.W., Choi, J.I., Hur, C.W., Oh, T.K., Kang, I.K.

Materials Research Society

Hur, B. Y., Park, B. K., Kim, S. Y., Bae, H.

Trans Tech Publications

Jae Young Hur, Sung Soo Kim, Hyung Ik Lee, Young-Kwon Park, Ji Man Kim

American Institute of Chemical Engineers

K.H. Kim, Y.H. Kang, J.H. Lee, E.S. Jung, I.H. Kang

Trans Tech Publications

D. Zhong, I-W. Park, A.O. Kunrath, B. Mishra, K.H. Kim, A.A. Voevodin, E.A. Levashov, J.J. Moore

Society of Vacuum Coaters

Lee,K.H., Cho,H.K., Park,J.H., Kim,Y.H., Yoon,H.S., Sohn,J.M.

SPIE-The International Society for Optical Engineering

Kim,Y.H., Park,J.H., Lee,K.H., Cho,H.K., Yoon,H.S.

SPIE-The International Society for Optical Engineering

Park, Y-B., Rhee, S., Choi, J-H., Kim, C-W., Suok, J. H.

MRS - Materials Research Society

1
 
2
 
3
 
4
 
5
 
6
 
7
 
8
 
9
 
10
 
11
 
12