Blank Cover Image

DRY ETCHING TECHNIQUES AND CHEMISTRIES FOR III-V SEMICONDUCTORS

Author(s):
Pearton, S.J.  
Publication title:
Long-wavelength semiconductor devices, materials, and processes : symposium held November 26-29, 1990, Boston, Massachusetts, U.S.A.
Title of ser.:
Materials Research Society symposium proceedings
Ser. no.:
216
Pub. Year:
1991
Page(from):
277
Page(to):
290
Pages:
14
Pub. info.:
Pittsburgh, Pa.: Materials Research Society
ISSN:
02729172
ISBN:
9781558991088 [1558991085]
Language:
English
Call no.:
M23500/216
Type:
Conference Proceedings

Similar Items:

Pearton,S.J.

SPIE-The International Society for Optical Engineering

Pearton, S.J., Vartuli, C.B., Shul, R.J., Zolper, J.C.

Electrochemical Society

Vartuli, C.B., Pearton, S.J., Abernathy, C.R., Shul, R.J., Ren, F.

Electrochemical Society

Pearton,S.J.

Trans Tech Publications

Pearton, S.J., Chakrabarti, U.K., Katz, A., Abernathy, C.R., Hobson, W.S., Ren, F., Fullowan, T.R.

Materials Research Society

Pearton, S. J., Chakrabarti, U. K., Ren, F., Abernathy, C. R., Katz, A., Hobson, W. S., Constantine, C.

MRS - Materials Research Society

4 Conference Proceedings Dry Etching of MRAM Structures

Pearton, S.J., Cho, H., Jung, K.B., Childress, J.R., Sharifi, F., Marburger, J.

Materials Research Society

Pearton,S.J.

Trans Tech Publications

Pearton, S.J., Chakrabarti, U.K., Baiocchi, F.A., Hobson, W.S.

Materials Research Society

Pearton, S.J.

Electrochemical Society

Pearton, S. J.

Electrochemical Society

McLane, G.F., Pearton, S.J., Abernathy, C.R.

Electrochemical Society

1
 
2
 
3
 
4
 
5
 
6
 
7
 
8
 
9
 
10
 
11
 
12