SYNCHROTRON TOPOGRAPHIC STUDIES OF THE INFLUENCE OF RAPID THERMAL PROCESSING ON DEFECT STRUCTURES IN SINGLE CRYSTAL SILICON

SYNCHROTRON TOPOGRAPHIC STUDIES OF THE INFLUENCE OF RAPID THERMAL PROCESSING ON DEFECT STRUCTURES IN SINGLE CRYSTAL SILICON

Author(s):

Dudley, Michael

Publication title:

Defects in materials : symposium held November 26-29, 1990, Boston, Massachusetts, U.S.A.

Title of ser.:

Materials Research Society symposium proceedings

Ser. no.:

209

Pub. Year:

1991

Page(from):

511

Page(to):

516

Pages:

6

Pub. info.:

Pittsburgh, Pa.: Materials Research Society

ISSN:

02729172

ISBN:

9781558991019 [1558991018]

Language:

English

Call no.:

M23500/209

Type:

Conference Proceedings

Details

TDL ID:	ZA00015693
Series ID:	PA00000011
Conf. info. (Name):	Symposium on defects in materials
Conf. info. (Number):	1990
Conf. info. (Venue):	Boston, MA, USA
Conf. info. (Date):	1990.11.26-1990.11.29

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