Blank Cover Image

ANALYSIS FOR THE CHARACTERIZATION OF OXYGEN IMPLANTED SILICON (SIMOX) BY SPECTROSCOPIC ELLIPSOMETRY

Author(s):
Publication title:
Defects in materials : symposium held November 26-29, 1990, Boston, Massachusetts, U.S.A.
Title of ser.:
Materials Research Society symposium proceedings
Ser. no.:
209
Pub. date:
1991
Page(from):
493
Page(to):
498
Pages:
6
Pub. info.:
Pittsburgh, Pa.: Materials Research Society
ISSN:
02729172
ISBN:
9781558991019 [1558991018]
Language:
English
Call no.:
M23500/209
Type:
Conference Proceedings

Similar Items:

Nguyen, N.V., Maslar, J.E., Kim, Jin-Yong, Han, Jin-Ping, Park, Jin-Won, Chandler-Horowitz, D., Vogel, E.M.

Materials Research Society

Dahmani, R., Salamanca-Riba, L., Beesabathina, D.P., Nguyen, N.V., Chandler-Horowitz, D., Jonker, B.T.

Materials Research Society

Krause, S.J., Seraphin, S., Chen, B.L., Cordts, B., Roitman, P.

Materials Research Society

Gubiotti, T., Jacy, D., Hoobler, R.J.

SPIE-The International Society for Optical Engineering

Li, W.J., Song, Z.R., Tao, K., Yu, Y.H., Wang, X., Zou, S.C.

Electrochemical Society

Asinovsky, L.M.

Materials Research Society

Lohner, T., Mezey, G., Fried, M., Ghita, L., Ghita, C., Mertens, A., Kerkow, H., Kotai, E., Paszti, F., Banyai, F., …

Materials Research Society

Lee, J.D., Park, J.C., Krause, S.J., Venables, D., Roitman, P.

Electrochemical Society

Chandler-Horowitz, D., Pellegrino, J. G., Nguyen, N. V., Amirtharaj, P. M., Qadri, S. B.

MRS - Materials Research Society

Anc, M J, Cordss, B F, Blake, J G, Nakai, T

Electrochemical Society

Brodkin, J.S., Franzen, W., Culbertson, R.J., Williams, J.M.

Materials Research Society

Lee, J. D., Park, J. C., Krause, S. J., Roitman, P., El-Ghor, M. K.

Materials Research Society

1
 
2
 
3
 
4
 
5
 
6
 
7
 
8
 
9
 
10
 
11
 
12