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X-RAY DOUBLE-CRYSTAL DIFFRACTION STUDIES OF Si+ IMPLANTATION IN SI GaAs

Author(s):
Publication title:
Advances in surface and thin film diffraction : symposium held November 27-29, 1990, Boston, Massachusetts, U.S.A.
Title of ser.:
Materials Research Society symposium proceedings
Ser. no.:
208
Pub. date:
1991
Page(from):
131
Page(to):
136
Pages:
6
Pub. info.:
Pittsburgh, Pa.: Materials Research Society
ISSN:
02729172
ISBN:
9781558991002 [155899100X]
Language:
English
Call no.:
M23500/208
Type:
Conference Proceedings

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